Novel Silicon Based Technologies

Gaas On Si: Device Applications.- Substrate Considerations.- Majority-carrier Devices.- Minority-carrier Devices.- Conclusions.- Ion Beam Synthesis In Silicon.- The Ion Implantation Process.- Buried Sio2 Layers In Si.- Buried Monocrystalline Cosi2 Layers In Si.- Conclusions.- Ion Beam Processing Of Chemical Vapor Deposited Silicon Layers.- Ion Beam Effects.- Epitaxy Of Deposited Layers.- Polycrystal Formation.- Technology And Devices For Silicon Based Three-dimensional Circuits.- 3d-technology.- Device Characteristics.- Features Of 3d-circuits.- Demonstrators.- Conclusions.- Integrated Fabrication Of Micromechanical Structures On Silicon.- Mechanical Properties Of Silicon.- Thermal Properties.- Fabrication Techniques.- Etching.- Anisotropic Etching.- Boron Doped Etch Stop.- Electrochemical Etch Stop.- Embedded Layers.- Surface Microstructures.- Bonding Of Layers.- Electrostatic Bonding.- Oxide Bonding.- Bonding To Metals.- Conclusion.- Micromachining Of Silicon For Sensors.- Physical Properties Of Silicon.- Transduction Techniques.- Fabrication Techniques.- Pressure Sensors.- Accelerometers.- Microresonator Sensors.- Optical Microresonator Sensors.- Conclusions.- Micromachining Of Silicon For Sensors.- Hybrid Or Monolithic Approach For Optoelectronics: That Is The Question.- About The Hybrid Approach Material Competitors.- Silicon Based Technologies Developed At Leti.- Planar And Channel Waveguide Properties Of Ios Technologies.- Field Of Activities.- Integrated Optical Spectrum Analyser (iosa).- Integrated Optical Sensors.- Optical Communication Applications.- Optical Memories.- Conclusion.- Principles And Implementation Of Artificial Neural Networks.- Binary Networks.- Analog Networks.- Miscellaneous Networks.- Future Vlsi Networks.- Conclusions.- List Of Participants.